3M氟化液FC-3283 

Introduction（产品简介）

3M氟化液FC-3283是无色透明全氟化学品，具有良好的化学惰性、电气绝缘性能、热传导性和第表面张力广泛应用于半导体制造厂作为热传导介质。其液体温度范围为-50°C 至128°C，主要应用于蚀刻设备、离子注入设备、测试设备及其他设备。因为FC-3283是单一组分，所以其成分不好出现降解或者过期。FC-3283沸点高，其随时间的挥发也比较少。

3M Fluorinert Electronic Liquid FC-3283 is a clear, colorless, thermally stable,fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps ?uid loss to a minimum and insures that transport properties will not change with time.

Physical Properties物理化学性质

Properties

FC-3283

Appearance外观

无色透明

Average Molecular Weight平均分子量

521

Boiling Point (1 atm)沸点

128℃

Pour Point倾点

��50℃

Estimated Critical Temperature 高承受温度

543 K

Estimated Critical Pressure 高承受压力

1180000pa

Vapor Pressure蒸汽压

1440pa

Latent Heat of Vaporization (at normal boiling point挥发潜热

78J/g

Liquid Density液体密度

1820kg/m3

Kinematic Viscosity运动粘度

0.75 centipoise

Absolute Viscosity绝对粘度

1.8centipoise

Liquid Speci?c Heat比热

1100 J/ kg°C

Liquid Thermal Conductivity导热率

0.066 W/ m°C

Coef?cient of Expansion膨胀系数

0.0012 /°C

Refractive Index折光率

1.290

Water Solubility溶水能力

<7 ppm

Solubility in Water水中溶解力

<5 ppm

Ozone Depletion Potential臭氧破坏潜值

0

Dielectric Strength介电强度

43 kV, 0.1" gap

Dielectric Constant介电常数

1.89

Electrical Resistivity绝缘强度

5.0 x 10(15)ohm cm